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NEW Millipore/Mykrolis/Entegris Fluoroware INGEN1PU0 IntelliGen PhotoChemical Dispense System with Impact LHVD Filter Comes with a manual and what you see in the pictures. If you don't see it, you probably wont get it. Specifications are from Millipore/Mykrolis and may vary slightly due to upgrades, options, or revisions this unit may or may not have. The unit is brand new in the original factory box. The part of Millipore who manufactured this system was sold to Mykrolis which is a part of Entegris. Description: LHVD Photo Chemical FIlter for INTELLIGEN Dispense System Subassembly The IntelliGen Dispense System with Impact LHVD Filter provides clean, repeatable, accurate, and economical point-of-use photochemical dispense. The compact IntelliGen Dispense System * Minimizes photoresist use through its reliable, repeatable, and accurate dispense technologies * Provides rapid filter change-out with no prewetting, de-wetting, tools, dripping or draining * Runs reliably without the need for intermittent adjustment. Membrane: Ultra high molecular weight polyethylene (5MM Dalton) Supports: Linear Low Density Polyethylene (LLPDE) core, endcap, and housing Max. Reverse and Forward Differntial Pressure: 3.4 bar (50 psid) @ 25°C Filter Hold-Up Volume: < or = to 55 mL Spontaneously Wets In: Butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA, NMP, and other photochemical solvents. Compatible With: Butyl acetate, PGMEA, PGME, NMP, ethyl lactate, MMP, TMAH, and cyclohexanone. Dispense Unit Specifications: Internal Wetted Surface: PTFE made of Teflon fluoropolymer resin Fluid Tubing: PFA made of Teflon fluoropolymer resin, 1/4" OD 5/32" ID Non-Wetted Surface: Electroless nickel plated (ENP) aluminum with a coating made of Teflon, Delrin, and Stainless Steel Dimensions (With Stand): 392.68 mm H x 115.82 mm W x 172.97 mm D (15.46" x 4.56" x 6.81") Dispense Volume (Includes dispense, purge, and suckback): 0.5 - 5.5 mL within limits, depending on dispense rate and fluid viscosity Maximum Dispense Volume (With no suckback, purge minimum is 0.1 mL): 6.4 mL Dispense Rate: 0.08 - 5 mL/sec in 0.001 mL/sec increments Dispense Accuracy: maintain a mean deviation of ± 0.020 mL for 1.00 - 5.5 mL Dispense Repeatability: ± 3 standard deviation < 0.02 mL for 1.00 - 5.5 mL Maximum Dispense Pressure: 1.7 bar (25 psi) @ 2.5 mL/sec * Single fixed time dispense without pre-dispense * Track controlled dispense with pre-dispense * Variable rate dispense without pre-dispense * Variable rate dispense with pre-dispense Suckback Volume: 0.0 - 3.0 mL in 0.001 mL increments Suckback Rate: 0.02 - 5 mL/sec in 0.001 mL increments Purge Volume: 0.1 - 6.5 mL in increments of 0.001 mL Filtrate Rate: 0.02 - 5.0 mL/sec in 0.001 mL/sec increments Current Rating: 1.25 AMPS max. Communication Baud Rate: 9600 Serial Command and Control Port: Multi-drop RS-232 Inlet Gas Pressure: 4.40 ± 0.33 bar (65 ± 5 psig) Vacuum: 20 in Hg (0.7 bar, 500 Torr) or greater Controller Venting: Approximately 2.75 l/min (> 2X controller volume/min) For More Pictures Please Click the Following: * Picture 8 - Impact LHVD Filter * Picture 9 - Serial Number Tag (this posting is the responsibility of the poster) |
junepeck@dfwind.com (June Peck) for more information. All emails will be forwarded to the poster's actual email address.
