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Operation / Maintenance manual for KLA Coherence Probe Metrology System. Manual is for the KLA 5015 which is used for the measurement, inspection process of CD, and wafer overlay misregistration tests. Includes sections on, system interface, wafer movements, automatic programs, overlay measurements, CD measurements, wafer setup, inspection setup, flowcharts, cell measurement in arrays, and discussion alignment. Has appendices for coherence probe metrology fundamentals, menu trees, diagnostic utilities, system start-up & shutdown, and troubleshooting. (this posting is the responsibility of the poster) |
E_Johns@dfwind.com (Eva Johns) for more information. All emails will be forwarded to the poster's actual email address.
